Metrology & Instrumentation : Optical Interferometric Profilers

Choose from a range FOV multiplier lenses to increase the final magnification of the objective without affecting final resolution. Multiplier tubes are available in 0.55X, 0.75X, 1.5X, and 2X.

• Wyko NT9000 Series Optical Profiling Systems Objectives Chart
  
  Low Res [528 KB pdf ]

The High-Definition Vertical Scanning Interferometry (HDVSI) mode utilizes an innovative algorithm to deliver sub-nanometer precision on a wide range of surfaces in a single measurement, significantly streamlining profiler operation for a range of applications.

The HDVSI mode combines the high vertical resolution of PSI with VSI’s ability to measure discontinuous and rough surfaces. The scanning mode is available for all Wyko optical profilers running Vision software version 3.6 or later.

Click here for datasheet [pdf]

The NEW In-Motion Solution: MEMS Package for Wyko NT9000 Series Optical Profilers enables detailed characterization of MEMS and other micro-devices during operation, including optical switches, micro-mirrors, and accelerometers. Slow-motion video provides a visual display of sample movement in three dimensions, providing fast static and dynamic surface metrology on a single system.

In-Motion integrates a proprietary stroboscopic illuminator, drive electronics, data acquisition and data analysis software to capture real-time measurement data of a sample as it cycles through its range of motion, at operating frequencies from 11 hertz to 2.4 megahertz.

Click here for low-res datasheet [pdf]

Click here for high-res datasheet [pdf] 

Veeco Instruments In-Motion Solution MEMS Package Webinar

Presenter: Bob Chanapan

Duration approx. 39 minutes

File size 83 MB

View it Now!

Install the GotoMeeting Codec to play the webinar video

Click on the image below to view video of In-Motion mirror deformation

The motorized, programmable four-position turret uses clean and quiet stepper motor/belt drive for quick, efficient operation with minimal contamination risk.

Veeco’s objectives feature excellent thermal stability and easy focusing for long-term measurement accuracy. 1.5X L

• Wyko NT9000 Series Optical Profiling Systems Objectives Chart
  
  Low Res [528 KB pdf ]

Veeco’s objectives feature excellent thermal stability and easy focusing for long-term measurement accuracy.2X LWD, 5X LWD, 10X LWD

• Wyko NT9000 Series Optical Profiling Systems Objectives Chart
  
  Low Res [528 KB pdf ]

Veeco’s objectives feature excellent thermal stability and easy focusing for long-term measurement accuracy. 2.5X L, 5X, 5X L, 10X, 10X BF, 20X, 50X, 100X (NEW)

Wyko NT9000 Series Optical Profiling Systems Objectives Chart [pdf]

• Wyko NT9000 Series Optical Profiling Systems Objectives Chart
  
  Low Res [528 KB pdf ]

Veeco’s certified pitch standard is primarily used for lateral calibration and magnification calibration.

The porous ceramic vacuum chuck bolts to the stage and provides a secure method for holding small and irregular parts.

Veeco offers an adapter for mounting single objectives to the NT profilers, as well as a low-profile adapter for use with long working distance objectives, TTM objectives, and for situations requiring maximum sample clearance.

Optimize your NT9100 Optical Profiling System for crystalline silicon photovoltaic (PV) cell production and process development metrology with a custom 156-millimeter programmable stage that allows for edge-to-edge measurements on 6-inch solar cells. This upgrade package also includes a porous vacuum chuck that securely and safely mounts standard PV cells.

Veeco offers a 10um, 2nd level NIST traceable calibration standard for calibration checking and monitoring, and a 50um, certified PTB traceable calibration standard for calibrating faster speeds.

The Annular Analysis Software Package permits advanced analyses such as displacement, acceleration, r-theta, and radial slope for calculating parameters on rings, washers, clamps, etc.

The MATLAB Interface Software Package allows the integration of custom data analysis using the popular MATLAB data visualization environment. The package includes scripts to export OPD files into MATLAB, some simple examples of Matlab analyses, and scripts to re-import the data and results back to Vision, along with a full MATLAB license.

The Optical Analysis Software Package provides common analyses used in lens design and manufacturing verification, including such calculations as asphere fit and zernike polynomial coefficient determinations

The SiC reference mirror provides ultra-flat, ultra-smooth reference generation for PSI mode and system noise measurements. A data set of the surface with the height listed in angstroms is included with the mirror

The Stitching Software Package uses Veeco’s patented stitching capability to increase the field of view by seamlessly fusing adjacent data sets from the sample surface, and analyzing them as a single data set with annular and rectangular layouts. The software effectively enlarges the field of view while maintaining magnification and spatial resolution.

The SureVision Software Package provides threshold- and template-based analysis to enhance automation of measurements and allow analysis of a wide variety of samples without the need for many “specialized” analyses. The package permits separation of datasets into individual analysis ‘islands’, and can perform pattern recognition, surface texture and shape analysis for each individual island.

The TCP/IP Control Interface Software Package allows the simplified operation and control of the profiler from an outside application. It provides easy-to-use interface control for the tool (including stages and sample handling) and allows integration of customer-supplied hardware.

The Thick Film Software Package analyzes optically transparent films from 2µm up to 150µm thick by de-convolving the overlapping fringe envelopes, delivering both top and bottom surface shape, and film thickness point by point.

With applications in MEMS, materials science, biological applications, and other challenging research, Veeco’s exclusive TTM module accessory enables optical profiler users to measure high-resolution samples through protective packaging, environmental chambers, or other dispersive materials up to 3mm thick. The universal housing allows for the quick change of magnification and the ability to compensate for variations in cover materials and thicknesses. Objectives are available in 2X, 5X, 10X, and 20X magnifications, providing effective magnifications from 1X through 40X. The TTM module won a 2005 R&D 100 Award for innovative technology.

TTM applications include:

• Hydrophallic/hydrophobic films, plastics, etc. under varying humidity
• Temperature effects on surface shape and roughness
• Packaged micromirror array roughness, tilts, and aberrations.
• MEMS resonance frequency, Bode, Nyquist plots as environment is perturbed
• Packaged devices under in-use atmospheric conditions
• Microfluidic channel roughness, volume, linewidth calculations pre- and post-encapsulation

Veeco’s objectives feature excellent thermal stability and easy focusing for long-term measurement accuracy. 2X TG, 5X TG, 10X TG, 20X TG

This simple toggle switch box simplifies the use of the NT vacuum and wafer chucks.

Veeco offers a selection of ergonomically compliant carts to provide monitor and keyboard setup and working area. The DMEMS cart, recommended for the NT1100 DMEMS and NT3300 DMEMS instruments and required for CE certification, completely houses the electronics of a full system, and provides a clean workstation for note taking, and holding the recommended dual monitors for analysis and system operation.