Gas & Vapor Delivery Systems

Gas & Vapor Delivery Systems

Veeco’s gas and vapor delivery systems address critical issues facing semiconductor manufacturers and foundries, including material costs, process repeatability and system up-time. 

Apex Gas Mixing System

Reduce production costs by purchasing lower-cost, higher-concentration gases with the Apex Gas Mixing System.

Precision Gas Mixing System

Get an improved gas mixture concentration with the Precision Gas Mixing System. It generates gas mixtures for tighter process control and higher yield.

Piezocon Gas Concentration Sensor

As the industry standard for reproducible vapor delivery control of chemical precursor vapors and dopant gases in CVD and MOCVD processes, the Piezocon® Gas Concentration Sensor provides increased yield.