Wafer Inspection Systems

Wafer Inspection Systems

Veeco Ultratech Superfast 4G+ Wafer Inspection System

Veeco Ultratech Superfast 4G+ Wafer Inspection System

Superfast 4G+ has upgrades that improve throughput, displacement repeatability and edge exclusion compared to the 4G.

Superfast Applications

  • Lithography
  • CMP
  • Annealing
  • Deposition
  • Etch
  • Edge Processing
  • Substrate Processing
  • Advanced Packaging

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