MOCVD Systems

MOCVD Systems

TurboDisc MaxBright MHP MOCVD System for LED Production

TurboDisc MaxBright MHP MOCVD System for LED Production

Industry's Highest Productivity, Highest Footprint Efficiency Platform for LED Manufacturing

The TurboDisc® MaxBright® MHP™ GaN MOCVD Multi-Reactor System is the new, modular high performance system that provides excellent yield, with as much as 20 percent within-wafer wavelength uniformity improvement over the MaxBright multi-reactor system, but with the same footprint, serviceability and layout configuration benefits of the MaxBright M™ multi-reactor system. Higher yields are achieved from hardware advancements that result in improved wavelength uniformity across all wafers. The MaxBright MHP multi-reactor system also provides lower cost of ownership as compared to the MaxBright multi-reactor system. This system leverages Veeco’s production-proven Uniform FlowFlange® gas distribution system technology and automation expertise by combining multiple high throughput MOCVD reactors in a modular two- or four-reactor cluster architecture. The improved reactors, based on Veeco’s highly successful K465i™ MOCVD system design, feature expanded wafer capacity and advanced, proprietary, closed-loop thermal control technology.

  • Multi-reactor architecture provides the industry’s highest productivity and highest footprint efficiency platform
  • As much as 20 percent within-wafer wavelength uniformity improvement for higher yield
  • Up to 15 percent increased footprint efficiency compared to the MaxBright multi-reactor system
  • Improved serviceability and layout configurations to accommodate various fab space requirements
  • System architecture enables single chamber or multi-chamber layer growth capability
  • Field upgradeable from the MaxBright M multi-reactor platform

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