MOCVD Systems

TurboDisc® MaxBright® M™ GaN MOCVD Multi-Reactor System platform is the industry’s highest footprint efficiency MOCVD system designed to manufacture high-quality, high-brightness light emitting diodes (LEDs). MaxBright M multi-reactor system provides up to 15 percent improved footprint efficiency, easier serviceability and offers accommodating layout configurations compared to the original MaxBright multi-reactor system. The MaxBright M multi-reactor system leverages Veeco’s production-proven Uniform FlowFlange® gas distribution system technology and automation expertise by combining multiple high throughput MOCVD reactors in a modular two- or four-reactor cluster architecture. The improved reactors, based on Veeco’s highly successful K465i™ MOCVD system design, feature both expanded wafer capacity and advanced, proprietary, closed-loop thermal control technology to achieve higher throughput as compared to the standard K465i MOCVD system. In addition, recipes can be transferred from the K465i MOCVD system to MaxBright M multi-reactor system seamlessly for rapid production start.

• Multi-reactor architecture provides industry’s highest productivity
• Up to 15 percent increased footprint efficiency compared to MaxBright multi-reactor system
• Enhanced serviceability access
• Reconfigured system layout accommodates fab facility requirements, such as sub-floor storage