TurboDisc MaxBright GaN MOCVD Multi-Reactor System

Industry's Highest Productivity Platform for LED Manufacturing

The TurboDisc® MaxBright® GaN MOCVD Multi-Reactor System is the industry’s most productive MOCVD system designed to manufacture high quality, high brightness light emitting diodes (LEDs). MaxBright leverages Veeco’s production-proven Uniform FlowFlange® technology and automation expertise by combining multiple high throughput MOCVD reactors in a modular 2- or 4-reactor cluster architecture. The improved reactors, based on Veeco’s highly-successful K465i design, feature both expanded wafer capacity and advanced, proprietary, closed-loop thermal control technology to achieve a 25% throughput improvement over the standard K465i. In addition, recipes can be transferred from the K465i to MaxBright seamlessly for rapid production start.

• Multi-reactor architecture provides industry’s highest productivity
  and lowest cost of ownership
• Reactors achieve 25% throughput improvement over the
  industry-standard K465i™
• Highest footprint efficiency of up to 2.5 times stand-alone MOCVD systems
• System architecture enables single chamber or multi-chamber
  layer growth capability
• Seamless recipe transfer from K465i for rapid production start