MOCVD Systems

MOCVD Systems

TurboDisc K465i GaN MOCVD for High Volume LED Production

TurboDisc K465i GaN MOCVD for High Volume LED Production

Highest Productivity and Best-in-Class Yields

The TurboDisc® K465i™ GaN MOCVD System is production-proven and provides high productivity for HB LED high-volume production fabs around the globe. The K465i MOCVD system achieves up to 90 percent yield (5nm bin) due to its superior uniformity and excellent run-to-run repeatability. It also offers high productivity due to its full automation and shortened recovery period after maintenance.

  • Combines the industry's highest capital efficiency with the highest productivity and best-in-class yields
  • Based on production-proven, high throughput K465 MOCVD platform
  • Incorporates new Uniform FlowFlange® gas distribution system technology for highest within wafer uniformity and ultimate process repeatability
  • Simplified design provides ease of tuning for fast production qualification and fast recovery after maintenance
  • Low maintenance TurboDisc high velocity laminar flow technology enables highest system availability
  • Lowest cost of ownership for maximum profitability

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