MOCVD Systems

MOCVD Systems

TurboDisc E475 As/P MOCVD System for Solar, ROY LED Production

TurboDisc E475 As/P MOCVD System for Solar, ROY LED Production

Enabling Highest Volume Production of Premium Devices

Get the industry's leading throughput for high-volume production of HB-LEDs, laser diodes, pHEMTs, HBTs, and III-V concentrator solar cells, with the Veeco TurboDisc® E475 As/P. This superb metal organic chemical vapor deposition (MOCVD) system delivers increased capacity and improved cost of ownership over previous systems. The E475 system also improves product quality, productivity and yield.

  • Industry's leading throughput is now available for mass production of HB-LEDs, concentrator solar cells, laser diodes, pHEMTs and HBTs
  • Sophisticated vacuum load-lock automation for long production cycles and highest productivity
  • Integrated RealTemp® 200 technology provides direct, automated closed-loop wafer temperature control, assuring process reproducibility
  • FlowFlange® offers discrete injection zones with individual flow matching, for excellent uniformity and repeatability

Features

  • Industry's leading throughput for high-volume production of multi-junction III-V concentrator solar cells, HB-LEDs, laser diodes, pHEMTs and HBTs
  • Low-maintenance TurboDisc® technology enables highest uptime
  • Integrated RealTemp® 200 technology provides direct wafer temperature control, fast gas switching and strict control of interface abruptness

Benefits

  • Ideal for mass production of HB-LED and concentrator solar cells
  • Superior material quality and process efficiency plus high productivity
  • High return on investment for HB-LEDs and III-V concentrator solar cells

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