MBE Components

MBE Components

Phosphorus Recovery System

Phosphorus Recovery System

Efficient, Safe Means of Trapping and Neutralizing White Phosphorus

Due to white phosphorus's extreme reactivity with oxygen, Veeco's Phosphorus Recovery System (PRS) provides a safe, efficient means of trapping and neutralizing white phosphorus from the growth module prior to venting an MBE system for maintenance and/or source reloading. The process is controlled and closely monitored through Veeco Molly® Growth Control Software.

The Veeco PRS is available in two models to accommodate low-volume or high-volume manufacturing environments.

  • Efficient, safe means of phosphorus neutralization
  • Easy process manipulation and monitoring using Molly Growth Control Software
  • Compatible with all MBE systems

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