Gridded RF Ion Sources

Gridded RF Ion Sources

NOVUS RF Ion Source Controller

NOVUS RF Ion Source Controller

Industry-Leading Power Delivery System for Veeco RF Gridded lon Sources

Veeco's NOVUS RF lon Source Controller features a state-of-the-art precision control system design, providing reliable and stable power for ion source operation in all types of processes. Power modules, improved RFN operation and integrated gas flow control with ratio capabilities allow for optimal ion source control and performance in the most demanding process environments.

  • Exceptional process stability with advanced beam control algorithms
  • Hassle-free neutralizer operation with variable frequency technology
  • Superior durability through sophisticated fault-handling circuitry
  • Customizable control settings for tailored source operation

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