Ion Beam Etch

Ion Beam Etch

NEXUS IBE-350Se Ion Beam Etch System

NEXUS IBE-350Se Ion Beam Etch System

Higher Throughput of ABS Deep Cavity Processing

Maximize the productivity of ABS deep cavity processing and high etch rate applications with Veeco's NEXUS® IBE-350Se™ Ion Beam Etching System. Key attributes include lower cost of ownership, high throughput, small footprint, improved system utilization and the ability to cluster on the NEXUS platform.

  • High-power operation with enhanced substrate cooling
  • High throughput and reduced footprint for lowest cost of ownership
  • Ability to cluster on common NEXUS platform

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