GEN930 R&D MBE System

Wafers up to 1x3"

The Veeco GEN930 is ideal for developing III-V or II-VI materials with direct pump coupling for nitride and oxide applications. The modular design ensures a cost effective, flexible solution that provides proven exceptional material quality. Plus optional analytical equipment for in-situ monitor of growth processes can be easily integrated upon request.

• Cost-effective, modular design enables the flexibility to expand systems capabilities as needed
• Versatile platform features several in-situ monitoring techniques: RHEED, pyrometry, ellipsometry, RGA, optical flux monitoring, and reflectance spectroscopy
• Incorporates core technology of Veeco GEN II MBE system—holder of GaAs and AlGaAs performance records
• Incorporates the industry's most innovative, reliable sources and components