GEN2000 Edge Production MBE System

Wafers 3x8", 7x6", 14x4", 23x3"

The GEN2000 provides superior throughput, longer campaigns, smaller footprint and cluster tool wafer handling. It is the ideal choice for high-volume manufacturing of wireless telecommunications devices such as HBTs and pHEMTs, and emerging applications requiring multi-6" production with low cost of ownership.

• Delivers industry's lowest cost per wafer
• Superior design enables 40%-60% smaller footprint than comparable MBE tools
• Modular architecture allows for up to two growth modules, increasing throughput or allowing processing of incompatible materials
• Easy maintenance maximizes uptime
• Optional bulkhead installation optimizes cleanroom space
• Incorporates the industry's most innovative, reliable system hardware, sources and components