GEN200 Edge Production MBE System

Wafers 1x8", 1x6", 4x4", 7x3", 14x2"

Veeco's GEN200 Edge is the most cost-effective and highest-capacity multi-4" production MBE system in the market today. The system delivers superior throughput, long campaigns and excellent wafer quality in growing GaAs- or InP-based wafers for such devices as pump lasers, VCSELs and HBTs.

• Delivers the lowest-cost 4X4" epiwafer growth
• Modular architecture allows significantly smaller footprint than comparable MBE tools
• Allows for up to two growth modules, increasing throughput or allowing processing of incompatible materials
• Optional bulkhead installation optimizes cleanroom space
• Incorporates the industry's most innovative, reliable system hardware, sources and components