GEN20 R&D / Pre-Production MBE System

Wafers 1x3", 1x4", 3x2"

The GEN20™ is an ultra-flexible tool with a design configurable for III-V and emerging materials including applications that require the integration of e-beam technology. The system incorporates production design technology that allows for an optional cluster tool wafer transfer system for an ideal lab-to-fab migration.

• Ideal for materials research and pre-production environments
• Vertical source to substrate orientation with 12 MBE source ports and the option to add e-beam capabilities
• Manual or automated wafer transfer options
• Configurable cryopanel, manipulator, shutters and in-situ monitoring equipment
• Modular design allows up to two growth modules