GEN10 Automated R&D MBE System

Wafers up to 1x3"

The most economical, flexible cluster tool system, in a proven platform, allows for up to three configurable, material specific growth modules. This enables high system utilization allowing multiple researchers to use the system at the same time and perform unattended growths and calibrations. This combined with Veeco components technology are key factors in why the MBE community is choosing the GEN10, no matter what the application.

• Automated wafer transfer enables high system utilization, allowing multiple researchers to use the system at the same time and perform unattended growths and calibrations
• Economical upgrade path to additional growth modules, maximum of three
• Configurable, material specific growth modules in a cluster architecture enable growth of incompatible materials in one vacuum system
• Direct process path to larger production MBE systems