Substrate Heaters

Tailored for specific temperature and growth environments

Veeco offers application-specific substrate heaters tailored for specific temperature and growth environment conditions. The standard design utilizes a PBN diffuser plate and sophisticated wire filament that provides consistent cross-sectional uniformity and efficient power consumption.

• Excellent thermal uniformity
• Efficient power consumption
• Clean operation
• Multiple filament materials available
• Application specific design and materials
• Extended life for oxygen and ammonia environments
• Dual filament heaters available
• Available for all standard MBE systems