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Select the MBE Components that's right for you.
  • Substrate Heaters
    Substrate Heaters
  • MBE Linear Motion Shutters
    MBE Linear Motion Shutters
  • Gas Source Delivery System
    Gas Source Delivery System
  • Phosphorus Recovery System
    Phosphorus Recovery System
  • CBr4 Gas Flow Control System
    CBr4 Gas Flow Control System
  • Phosphorus Valved Cracker Temperature Controller
    Phosphorus Valved Cracker Temperature Controller
  • Automated Valve Positioner
    Automated Valve Positioner
  • Growth Stage Positioner
    Growth Stage Positioner
  • UNI-Bulb RF Plasma Source Autotuner
    UNI-Bulb RF Plasma Source Autotuner
  • MBE Software
    Growth Control & Scheduling Software for MBE Systems
  • DC Power Supply with PID Temperature Controller
    DC Power Supply with PID Temperature Controller
  • MBE Crucible
    MBE Crucibles
  • MBE Heated Viewports
    MBE Heated Viewports
  • MBE Source Flanges
    MBE Source Flanges
  • MBE System Cables
    MBE System Cables
  • UNI-Block MBE Substrate Holders
    UNI-Block MBE Substrate Holders
  • Oxygen Pressure Control System

Gas Source Delivery System

Gas Source Delivery System

For precise control of Veeco MBE gas sources

Veeco's Gas Source Delivery System (GSDS) provides precise control of gases, interlocks and monitoring for inert, hazardous and/or flammable gases. Molly® ECS1 Growth Control Software provides for easy integration to your existing system.

A variety of package options are available to suit your needs, and your budget. All packages are inclusive of manual gas line shut off valve for each circuit, gas filter purifier, mass flow controller and pneumatically controlled run and vent valves.


  • Efficient, safe means of controlling gases for Veeco MBE gas sources
  • Easy process manipulation and monitoring
  • Three model configurations to suit specific applications and budgets
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