TurboDisc K465i GaN MOCVD System

Highest Productivity and Best-in-Class Yields

The TurboDisc® K465i™ GaN MOCVD System is production-proven and provides high productivity for HB LED high-volume production fabs around the globe.  The K465i achieves up to 90% yield (5nm bin) due to its superior uniformity and excellent run-to-run repeatability.  It also offers high productivity due to its full automation and shortened recovery period after maintenance.

• Combines the industry's highest capital efficiency with the highest productivity and best-in-class yields
• Based on production-proven, high throughput K465 platform
• Incorporates new Uniform FlowFlange® technology for highest within wafer uniformity and ultimate process repeatability
• Simplified design provides ease of tuning for fast production qualification and fast recovery after maintenance
• Low maintenance TurboDisc technology enables highest system availability
• Lowest cost of ownership for maximum profitability