TurboDisc K465 GaN MOCVD System

Automated for highest production, most profitability

The Veeco TurboDisc® K465 GaN MOCVD System delivers the industry's highest throughput -- and its only production-proven automated MOCVD platform -- for high volume production of GaN-based blue and green LEDs and blue lasers, through advanced TurboDisc reactor technology. Reconfigurable reactor and source modules can accommodate multiple wafer reactor technologies. A fully-automated, high capacity system, the K465 provides and extendable platform for long capital life.

• Delivers the industry's highest MOCVD throughput for GaN-based blue and green LEDs and blue lasers
• Automated platform produces more profit for HB-LED manfacturers while controlling capital cost
• Unique TurboDisc technology assures excellent production yields
• Industry's highest production automated vacuum loadlock with hot carrier transfer provides highest throughput
• FlowFlange® discrete injection zones with individual flow matching provide excellent uniformity and repeatability
• Hot carrier transfer system can be loaded at any time during the process cycle while the reactor remains under vacuum
• Automatic carrier transfer system does not require parts changes between runs