Precision Surface Processing Systems

Precision Surface Processing Systems

Metal Lift Off - WaferStorm Platform

Metal Lift Off - WaferStorm Platform

Proprietary ImmJET Wafer Processing Technology

This solvent-based system integrates Veeco's ImmJET technology combination for improved yield, higher throughput, and lower chemical cost than conventional wet bench or single spray tools. The immersion station operates in a low-oxygen atmosphere, which maintains the bath life. Following a soak in the immersion tank, lift-off takes place in a spray chamber.

Features

  • Heated immersion tank
  • High-pressure spray chamber
  • Lift-off material filtration system
  • High-pressure flow monitoring
  • Low chemical consumption

 Applications

  • MEMS
  • LED/VCSEL
  • RF Devices
  • Power Electronics
  • Compound Semiconductors
  • Data Storage
 

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