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Select the Ion Beam Etch that's right for you.
  • NEXUS IBE-350Si Ion Beam Etching System
  • NEXUS IBE-420i Ion Beam Etching System
  • NEXUS IBE-420Si Ion Beam Etching System
  • NEXUS IBE-350Se Ion Beam Etching System

NEXUS IBE-350Se Ion Beam Etching System

 

Higher throughput of ABS deep cavity processing

Maximize the productivity of ABS deep cavity processing and high etch rate applications with Veeco's NEXUS® IBE-350Se™ Ion Beam Etching System. Key attributes include lower cost of ownership, high throughput, small footprint, improved system utilization and the ability to cluster on the NEXUS platform.

  • High power operation with enhanced substrate cooling
  • High throughput and reduced footprint for lowest cost of ownership
  • Ability to cluster on common NEXUS platform
More Information
Download Advanced Sensor Fabrication Using Integrated Ion Beam Etch and Ion Beam Deposition Processes
[124 KB PDF]
Download Applications of Reactive Ion Beam Etching to Thin Film Magnetic Head Track-Width Trimming
[267 KB PDF]
Download Cost-Effective Thin-Film Bulk Acoustic Resonator (FBAR) Production
[46 KB PDF]
Download Reactive Ion Beam Etching of InP
[63 KB PDF]
36.3 MB MOV Watch Ion Beam Etch Animation [36.3 MB MOV]
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