SPECTOR Large Area Planetary Ion Beam Deposition System

Increased throughput and excellent material uniformity

Veeco's SPECTOR® Large Area Planetary Ion Beam Deposition System combines unsurpassed ion beam film quality with batch sizes near that of e-beam systems.  In addition to a larger overall coating area, the robust fixture supports processing monolithic substrates up to 400mm in diameter and 100mm thick.  Veeco has included our 16cm RF high-power deposition source and ultra-low contamination RF neutralizers to ensure high deposition rates and film quality.  For maximum stoichiometry control and in-situ substrate pre-cleaning or etch support, the system is also equipped with our 12cm RF assist ion source.

• Ion beam quality with industry-leading throughput provides the lowest cost of ownership
• Exceptional material uniformity across 400mm planets ensures maximum product yield
• High current RF ion sources provide excellent deposition rates
• Maximum product flexibility provided by large substrate and palette support