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Ion Beam Systems & Sources
Ion Beam Deposition
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Select the Ion Beam Deposition that's right for you.
  • SPECTOR Loadlock IBD System
  • SPECTOR-HT IBD System
  • NEXUS LDD-IBD Ion Beam Deposition System
  • SPECTOR Large Area Planetary IBD System
  • SPECTOR Ion Beam Deposition System
  • NEXUS IBD Ion Beam Deposition System

NEXUS IBD Ion Beam Deposition System

 

Ideal for hard bias, lead, insulation layer and sensor stack deposition

Data storage manufacturers can dramatically increase yield of 80Gb/in2 sensors, as well as meet the demands of future TFMH device fabrication with Veeco's third-generation NEXUS® Ion Beam Deposition (IBD) System.

  • Supports wide range of devices, from current CIP to advanced CPP devices
  • Ideal for MRAM applications as well as GMR and TMR thin film magnetic heads
  • Improved CD control for all collimated deposition applications
  • Sharper takeoff angle through symmetrical arrival of the deposition plume
  • Platform easily integrated with PVD, IBE and other technologies
More Information
Download Advanced Sensor Fabrication Using Integrated Ion Beam Etch and Ion Beam Deposition Processes
[124 KB PDF]
Download Cost-Effective Thin-Film Bulk Acoustic Resonator (FBAR) Production
[46 KB PDF]
42.2 MB WMV Watch Nexus Ion Beam Deposition Animation [42.2 MB WMV]
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