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Ion Beam Deposition
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Select the Ion Beam Deposition that's right for you.
  • SPECTOR Loadlock IBD System
  • SPECTOR-HT IBD System
  • NEXUS LDD-IBD Ion Beam Deposition System
  • SPECTOR Large Area Planetary IBD System
  • SPECTOR Ion Beam Deposition System
  • NEXUS IBD Ion Beam Deposition System

NEXUS LDD-IBD Ion Beam Deposition System

ion beam deposition

Ultra-thin single-layer and multi-layer film coatings

Deposit extremely thin single- and multi-layer film coatings for data storage and compound semiconductor devices with Veeco's NEXUS® Low Defect Density Ion Beam Deposition (LDD-IBD) System. Specifically designed for low particulate deposition processes, it offers an ideal thin film technology platform for phase shift masks and next-generation lithography applications such as extreme ultra violet (EUV) masks.

  • High performance, production-worthy system
  • Offers excellent uniformity and high repeatability
  • Based on award-winning technology
  • Can be integrated with other process modules into a cluster tool
  • Effective as a single module for R&D or pilot line applications.
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42.2 MB WMV Watch Nexus Ion Beam Deposition Animation [42.2 MB WMV]
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