>
Technologies & Products
> > > Features and Benefits
Select the Ion Beam Deposition that's right for you.
SPECTOR Loadlock IBD System
SPECTOR-HT IBD System
NEXUS LDD-IBD Ion Beam Deposition System
SPECTOR Large Area Planetary IBD System
SPECTOR Ion Beam Deposition System
NEXUS IBD Ion Beam Deposition System
Ion Beam Deposition Features and Benefits
SPECTOR Loadlock IBD System - Superior throughput and repeatability for a wide range of applications
Features:
- Deposits extremely thin single and multi-layer film coatings
- Designed for low particulate deposition
- Based on award-winning technology
- For single module function or as part of cluster tool
Benefits:
- High performance, production-worthy system
- Offers excellent uniformity, high repeatability and angstrom-level accuracy
- Ideal for phase shift masks and extreme ultra violet (EUV) masks
Features:
- Robust planetary fixture design
- 16cm RF high-power deposition source
- Ultra-low contamination RF neutralizers
Benefits:
- Ion beam quality with industry-leading throughput provides the lowest cost of ownership
- Exceptional material uniformity across 400mm planets ensures maximum product yield
- High current RF ion sources provide excellent deposition rates
- Maximum product flexibility provided by large substrate and palette support
Features:
- Broad range of precision coating applications
- Interchangeable platform accommodates planetary, simple rotation, or flip fixtures
- Low-pressure operation provides high film purity
- State-of-the-art process control platform
Benefits:
- Meets the needs of virtually every optical thin film application
- Superior film thickness control
- Provides telecom devices that meet stringent characteristic specifications
- High energy ion beam deposition process offers better packing density and low pin-hole density
Features:
- Improved CD control for all collimated deposition applications
- Sharper takeoff angle through symmetrical arrival of the deposition plume
- Platform allows for easy integration with PVD, IBE and other technologies
Benefits:
- Dramatically increase yield of 80Gb/in2 sensors
- Ideal for MRAM applications as well as GMR and TMR thin film magnetic heads
- Supports wide range of devices, from current CIP to advanced CPP devices