Select the Diamond-like Carbon System that's right for you.
NEXUS DLC System
Diamond-Like Carbon Systems Features and Benefits
Features:
- Industry's first production-worthy pulsed filtered cathodic arc
- Long throw, low pressure PVD
- Reactive PVD process capable
- Stable operation with tuneable low energy NEXUS 420 ion beam etch source
- Tilting ellipsometer facilitates etch and deposition end point control
Benefits:
- Exceptional uniformity, repeatability and film hardness
- Provides dense, pin-hole free silicon seed layer
- Improved step coverage for better process yields
- Longer-lasting slider overcoats and landing pads