Dektak 8
- Description
- Accessories & Options
- Application Notes
Dektak 8
The Dektak® 8 Advanced Development Profiler combines high repeatability, low-force sensor technology, and advanced 3D data analysis for surface characterization of MEMS, semiconductors and other thin/thick films. The system provides 7.5 angstrom, 1 sigma step height repeatability and a vertical range of up to 1mm. Its overhead gantry design enables scan lengths to 200mm, for planarity and flatness measurements.
Dektak's exclusive N•Lite™ low force sensor option offers stylus forces down to 0.03mg, for scratch-free measurement of soft materials. N-Lite also enables the use of super-sharp styli which can characterize sub-micron lines and spaces, while high aspect ratio tips access deep trenches, measure Shallow Trench Isolation (STI) etch depth, and probe deep structures for MEMS research.
1mm Range Kit 
The 1mm Range Kit increases your stylus profiler’s maximum vertical range from 512µm to 1mm. Range kit comes complete with a 900um step calibration standard to verify performance and range.
Calibration Standards
A number of calibration standards are available to best match system performance to your system and application certification requirements, including NIST- and PTB-traceable 10µm and 50µm step height standards for tracking system performance and certified pitch standards for magnification and lateral calibrations. Each comes with its own serial number and a Certificate of Calibration.
Available standards include 50nm, 100nm, 230nm, 450nm, 1um, 5um, 10um, and 900um.
Styli Type A (0.7um green, 0.2um yellow, 2X20 white , 20X200 pink)
Veeco offers a number of different styli to best suit your stylus profiler application, including high-aspect ratio (HAR) tips for accurate deep trench measurements. Styli come complete with a certificate of certification.
Diamond tip, radii stylus with SEM image verification.
Styli Type B (25um black, 12.5um red, 5um orange, 2.5um grey) 
Veeco offers a number of different styli to best suit your stylus profiler application, including high-aspect ratio (HAR) tips for accurate deep trench measurements. Styli come complete with a certificate of certification.
Stylus Replacement Fixture 
Every Dektak system comes with a stylus exchange fixture. Replacement stylus exchange fixtures are also available.
The Advanced APS software package 
The Advanced APS software package updates and enhances the standard automation program summary. The software boasts advanced filtering capabilities as well as run-time plotting and is specifically designed for improved quality control with such features as lower and upper control limits and post acquisition plotting
.
The Deflection Scan software package 
The Deflection Scan software package performs a static scan with a ramping of force over time to allow accurate determination of stiffness of cantilevers and similar small parts.
The Stress Measurement software package 
The Stress Measurement software package utilizes Veeco’s proprietary algorithm to simultaneously calculate tensile and compressive stress on wafers and other substrates. This package enables the Dektak instrument to quickly and accurately perform film delamination studies and other internal thin film stress analyses on a variety of deposited films.
The Vision software package 
The Vision software package includes over 200 analyses and visualization tools for post processing data visualization and analysis.
This award-winning package visualizes data with 2D and 3D plots with full-screen viewing, rotation, and grid display and includes color palette for heights and background color modification.
Vacuum Chuck 
The vacuum chuck provides a 60mm ceramic surface assembly for holding down small parts by vacuum during measurements. Requires smooth vacuum source (24-inch Hg. minimum).
Vibration Isolation Tables 
When performing precision metrology, ground vibration and other environment noise can affect data results significantly. To combat this, Veeco offers a choice of air isolation tables, providing optimum conditions for repeatable measurement.
To view and download application notes pdf files, select the title below. If you can't view the pdf,
Get Adobe Reader.
