Metrology & Instrumentation
Epitaxial Equipment
Process Equipment
Solutions for a nanoscale world.™

Process Equipment

From the leaders in etch and deposition process equipment

World-class process equipment solutions

Veeco creates world-class process equipment solutions for manufacturers using thin film etch and deposition technology to create components such as:

  • HB-LED devices (high-brightness light emitting diodes)
  • CIGS (copper, indium, gallium and selenium) Solar Cells
  • Thin Film Magnetic Heads (TFMH) for Hard Drives


Thin Film Process Equipment Solutions

Diamond-like Carbon Deposition  
DLC Deposition Systems   

NEXUS DLC Deposition Systems provide protective coatings that meet the slider overcoat and landing pad demands of next generation thin film magnetic heads.

 
Ion Beam Deposition  
Ion Beam Deposition   

Create ultra-precise, high purity thin film layer devices with maximum uniformity and repeatability with NEXUS® Ion Beam Deposition (IBD) Systems.

 
Ion Beam Etch Systems  
Ion Beam Etch   

Etch precise, complex features for high-yield production of discrete microelectronic devices and components with the NEXUS Ion Beam Etch (IBE) Systems.

 
Ion Sources  
Ion Sources   

Veeco offers the most comprehensive array of ion beam sources for a broad range of applications, including Gridded DC and Gridded RF sources, Gridless Anode and Gridless End Hall sources, as well as Isoflux Cylindrical Magnetrons.

 
Physical Vapor Deposition  
Physical Vapor Deposition   

Ensure high-yield fabrication of thin film-based devices for next generation products with Veeco's NEXUS Physical Vapor Deposition (PVD) Systems.

 
Chemical Vapor Deposition  
Chemical Vapor Deposition   

Enables Thin Film Magnetic Head Areal Densities Greater Than 400gb/in²

 
Lapping/Dicing Systems  
Lapping/Dicing Systems   

Process TFMH wafers, LED devices and solar cells with greater precision and higher throughput with Veeco's Optium® line of lapping and dicing systems.

 
Thermal Deposition Sources  
Thermal Deposition Sources   

Veeco is advancing the introduction of thin film CIGS solar cells with our PV-Series™ sources: the world's only production-scale thermal deposition sources for high-efficiency, highly uniform CIGS thin film manufacturing.

 
CIGS Coating Systems  
CIGS Coating Systems   

Veeco integrates sputtering, reactive sputtering and thermal evaporation technologies on their FastLine™ and FastFlex™ Coating Systems for glass and flexible thin film substrates.

 

Process Equipment Application Support

Partnering with leading data storage and solar cell manufacturers around the globe, Veeco continually introduces next generation technology to improve productivity, system reliability and nanoscale device uniformity.

Veeco sets the standard for maximizing uptime and minimizing cost of ownership of our products. With 24-hour-per-day, seven-day per-week service around the world, you can count on us to deliver the latest process equipment applications support and keep you running with maximum productivity.

Customer satisfaction is based on more than just superior equipment—it’s the total measure of how that equipment performs in your applications. Contact us to learn more.