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Process Equipment : Ion Beam Etch

NEXUS IBE-350Se Ion Beam Etching System

NEXUS IBE-350Se Ion Beam Etching System
Higher throughput of ABS deep cavity processing

Maximize the productivity of ABS deep cavity processing and high etch rate applications with Veeco's NEXUS IBE-350Se Ion Beam Etching System. Key attributes include lower cost of ownership, high throughput, small footprint, improved system utilization and the ability to cluster on the NEXUS platform.

NEXUS IBE-350Se Ion Beam Etching System
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  • High power operation with enhanced substrate cooling
  • High throughput and reduced footprint for lowest cost of ownership
  • Ability to cluster on common NEXUS platform
   Contact Veeco for detailed specifications