Metrology & Instrumentation
Epitaxial Equipment
Process Equipment
News & Events
Press Releases
Read the latest announcements from Veeco corporate, metrology and instrumentation, process equipment, and epitaxial equipment.
Software Update Advances Nanolithography Capabilities
Software Update Advances Nanolithography Capabilities
Mar 12, 2002
Software Update Advances Nanolithography Capabilities
Mar 12, 2002
Santa Barbara, CA, March 12, 2002 — Veeco Metrology Group has announced the release of updated Nanolithography, version 1.7 software. This package significantly extends nanoscale surface modification capabilities. It enables all the basic nanolithography techniques, from surface scratching to growing oxides by voltage pulses. A host of innovative features makes the Nanolithography 1.7 the most sophisticated lithographic software available.
"This is a very flexible, powerful, yet straight-forward package," explains Xiaomei Li, product manager at Veeco Metrology Group. "Nanolithography 1.7 greatly increases the functionality of our best-selling AutoProbe® M5 and CP-Research™ atomic force microscopes. Step-by-step control of the nanolithography process through script language enables the user to completely manage a lithographic event before it is executed."
The Nanolithography 1.7 software offers control over tip approach and retraction as well as the patented, ScanMaster™ closed-loop feedback scanning. Surface scratching can be performed using either predefined Z-piezo extensions or a constant force from the cantilever. For lithographic patterns, it provides options that include points, lines, grid, array of points, open and closed arcs, and characters. In addition, the software can create patterns defined by mathematical functions and can even read bitmap files generated by other drawing software packages such as Adobe Photoshop®. For the utmost in flexibility, Nanolithography 1.7 is based upon an open-architecture platform that allows users to customize and add to the software for their particular nanolithography applications.
Veeco Instruments, Inc. (NASDAQ:VECO) is a worldwide leader in process equipment and metrology tools for the optical telecommunications/wireless, data storage, semiconductor and research markets. Manufacturing and engineering facilities are located in New York, California, Colorado, Arizona, and Minnesota. Global sales and service offices are located throughout the United States, Europe, Japan, and Asia Pacific. Additional information on Veeco can be found at www.veeco.com.
"This is a very flexible, powerful, yet straight-forward package," explains Xiaomei Li, product manager at Veeco Metrology Group. "Nanolithography 1.7 greatly increases the functionality of our best-selling AutoProbe® M5 and CP-Research™ atomic force microscopes. Step-by-step control of the nanolithography process through script language enables the user to completely manage a lithographic event before it is executed."
The Nanolithography 1.7 software offers control over tip approach and retraction as well as the patented, ScanMaster™ closed-loop feedback scanning. Surface scratching can be performed using either predefined Z-piezo extensions or a constant force from the cantilever. For lithographic patterns, it provides options that include points, lines, grid, array of points, open and closed arcs, and characters. In addition, the software can create patterns defined by mathematical functions and can even read bitmap files generated by other drawing software packages such as Adobe Photoshop®. For the utmost in flexibility, Nanolithography 1.7 is based upon an open-architecture platform that allows users to customize and add to the software for their particular nanolithography applications.
Veeco Instruments, Inc. (NASDAQ:VECO) is a worldwide leader in process equipment and metrology tools for the optical telecommunications/wireless, data storage, semiconductor and research markets. Manufacturing and engineering facilities are located in New York, California, Colorado, Arizona, and Minnesota. Global sales and service offices are located throughout the United States, Europe, Japan, and Asia Pacific. Additional information on Veeco can be found at www.veeco.com.