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Development partnership makes advanced metrology systems available to MEMS fabricators and researchers

Tucson, AZ – September 10, 1999 —Veeco Metrology Group has formed a development alliance with the Corporation for National Research Initiatives (CNRI) to provide metrology tools and expertise for research and design of micromachined electromechanical systems (MEMS). The arrangement is part of CNRI's "MEMS Exchange" program to advance the infrastructure for MEMS research and fabrication.

The MEMS Exchange is composed of multiple, geographically dispersed MEMS-related facilities around the country, including Cornell, Stanford, and Berkeley. Through CNRI, these sites provide processing services to the MEMS community at large, to lower development costs, increase design freedom, and provide better access to fabrication tools and facilities.

Dr. Michael Huff, Director of the MEMS Exchange, said, "We chose to work with Veeco because of their tools' outstanding performance and because of their willingness to partner to advance metrology for the MEMS community." He added that the prevalence of Veeco equipment throughout the MEMS community was also an important consideration.

In the initial phase of the agreement, CNRI has purchased Wyko NT3300^™ optical profilers and a Dektak V 200-SL stylus profiler from Veeco. The Wyko NT3300 provides fast, 3D surface height measurements using uses non-contact, white light interferometry. The system is ideal for MEMS metrology applications including surface roughness, step measurements of features and photoresist films, and non-contact measurement of cantilevered beams and diaphragms. The Dektak V 200-SL is a fully automated stylus profiler, with robotic, dual-cassette handling for process monitoring of MEMS etch and deposition processes.

Huff said that CNRI plans to make the profilers available for remote use via the Internet. As with other metrology tools used in the program, registered users will be able to access and even control the systems remotely.

Lloyd LaComb, Vice President and General Manager of Veeco Metrology Group, Tucson, said, "This innovative program is making excellent use of available resources such as the Internet to develop much-needed infrastructure. Veeco has maintained a long-standing commitment to the MEMS community, so we're pleased to be a part of this forward-thinking project."

CNRI is a not-for-profit organization formed in 1986 to foster research and development for the National Information Infrastructure. The organization promotes various collaborative activities that create productive synergies among government agencies, universities, and private organizations; undertakes targeted research in technologies for digital objects rights management, and high-speed networking; and supports various educational initiatives in the public interest.

Veeco Metrology Group, located in Tucson, Arizona, and Santa Barbara, California, is a division of Veeco Instruments Inc. (NASDAQ: VECO). Headquartered in Plainview, New York, Veeco is a worldwide leader in metrology tools for the data storage, semiconductor, and industrial/research markets, and etch and deposition process equipment for data storage. Manufacturing and engineering facilities are located in New York, California and Arizona. Global sales and service offices are located throughout the United States, Europe, Japan and Asia-Pacific.
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