Metrology & Instrumentation
Epitaxial Equipment
Process Equipment
Solutions for a nanoscale world.™

Epitaxial Equipment : MBE Components

MBE Linear Motion Shutters

MBE Linear Motion Shutters
Faster action, longer life

Get a fast-action alternative to integral shutters for controlling beam flux in molecular beam epitaxy (MBE) systems with Veeco linear motion shutters. The shutter is dampened to provide a long service life (>1 million cycles), the action is bellows-sealed and pneumatically driven, and the shaft is guarded to prevent pneumatic actuator clogging.

MBE Linear Motion Shutters   More Information
 
  • Veeco Heated Viewports prevent coating of optical
  • Reliable, durable, fast-action (50 ms open or close) alternative to integral shutters for controlling beam flux in MBE systems
  • Dampened shutter undergoes reduced shock and vibration -- designed for service life of >1 million cycles
  • Action is bellows-sealed and pneumatically driven
  • Shaft guarded by an enclosure that prevents condensed evaporant from clogging actuator
  • Pneumatic actuator prevents interference with RHEED or other sensitive equipment
  Contact Veeco for detailed specifications