Select the MBE Components that's right for you.
Substrate Heaters
MBE Linear Motion Shutters
Gas Source Delivery System
Phosphorus Recovery System
CBr4 Gas Flow Control System
Phosphorus Valved Cracker Temperature Controller
Automated Valve Positioner
Growth Stage Positioner
UNI-Bulb RF Plasma Source Autotuner
Growth Control & Scheduling Software for MBE Systems
DC Power Supply with PID Temperature Controller
MBE Crucibles
MBE Heated Viewports
MBE Source Flanges
MBE System Cables
UNI-Block MBE Substrate Holders.jpg)
Oxygen Pressure Control System
MBE Components Systems Features and Benefits
Features:
- PBN-constructed diffuser plate
- Robust wire filament available in multiple materials and optional dual filament design
- Optimized filament surface area and heat shielding
- Diffuser material for alternative growth enviroments
- Available as direct replacement for all standard MBE systems
Benefits:
- Excellent thermal uniformity
- Prevents hot spot formation
- Reduces power consumption by as much as 50%
- Clean operation
- Optimal reliability and reproducibility
- Corrosion-resistant designs available
Features:
- Fast-action (50 ms open or close) alternative to integral shutters for controlling beam flux in all standard MBE systems
- Shutter dampened to reduce shock and vibration
- Action is bellows-sealed and pneumatically driven
Benefits:
- Reliable and durable -- designed for more than 1 million cycles
- Pneumatic actuator prevents interference with RHEED or other sensitive analytical equipment
- Guarded shaft prevents condensed evaporant from clogging the actuator
Features:
- Application-specific configurations
- Control, interlocks and monitoring in one integrated design
- Option to include gas supply regulator for each circuit and N2 purge gas circuits for gas lines and pump purge
Benefits:
- Precise delivery of inert, hazardous and/or flammable gases
- Easy process manipulation and monitoring using Veeco Molly Growth Control Software
- Compatible with all MBE systems integrated with ECS1 version of Molly Software
Features:
- Compact unit directly connects to growth module via isolated gate valve
- Two models to accommodate R&D and production applications
Benefits:
- Virtually eliminates the danger of phosphorus auto-ignition
- Easy integration with MBE system
Features:
- Closed-loop pressure control
- Pneumatically operated series of on/off valves
- Interlocking mechanisms
- Two modes of operation: LOCAL and REMOTE
- Options to include independent plumbing to introduce H2 gas into an Atomic Hydrogen Source
Benefits:
- Maximum CBr4 gas control prevents equipment damage and ensures peek performance
- Means to enhance atomic surface mobility
Phosphorus Valved Cracker Temperature Controller - Accurate and stable control of flux instabilities
Features:
- Stabilizes white zone temperature and flux
- Compatible with all previous and current Veeco Valved Crackers
Benefits:
- Simplifies the source process settings
- Constant white zone temperature ensures flux stabilities
Features:
- Can be used with Veeco Valved Crackers
- Automated remote control or local manual control of a servo motor can be used to drive the valve
- Easily integrated with MBE growth control software
Benefits:
- Provides precise and reproducible flux control through the source needle valve
- Cost-effective and flexible in many different applications
- Can function unattended
Features:
- Can be used with Veeco manipulators
- Automated remote control or local manual control of independent servo motors is used to drive substrate positioning and rotation
- Easily integrated with MBE growth control software
Benefits:
- Provides precise, accurate and reproducible positioning and rotation of substrate
- Directly interfaces with substrate manipulator for optimal closed-loop control and feedback
- Can function unattended
Features:
- Permits hands-free operation using new plasma autotuning unit
- Automatically adjusts and maintains optimal plasma source conditions
- Directly replaces Veeco manual tuner, works with existing power supplies
- Based on popular, proven material delivery system for oxide and nitride applications
Benefits:
- No need for manual adjustments during experimentation
- Ideal for automating processes in which operating conditions (e.g., gas flow, power level) frequently change
- Ensures stable growth conditions plus exceptional stability, reproducibility and energy-efficiency
Features:
- EpiTrend "always-on" data archiver and display allows comparison of current and historical data
- LiberatorTM feature lets you review logs and data offline
- Recipe checking and diagnostics allow setup and readiness verification
- Highly flexible lot and run sheets, with easy configuration to automatically control platen transfer from module to module
- Lot Manager can initiate user-defined growth recipes
Benefits:
- Maximized system uptime and usability
- More precise control over programming
- Easy-to-use, robust platform for controlling Veeco's automated production MBE systems
- Minimized downtime and product scrap
- Expandable and upgradeable
Features:
- Complete line of DC power supplies includes integrated PID temperature controllers
- Designed for either closed-loop temperature or power feedback and standalone or stack configuration
- Compatible with all Veeco effusion cells
- Certified for all major regulatory compliance standards
- 4-year parts and labor warranty
Benefits:
- Superior reliability and dependability in a range of applications
- Accurate, reliable operation of MBE source and substrate heaters
- Offer excellent flux stability for MBE sources
- Stack configuration for applications where power requirement is greater than a single power supply can provide
Features:
- Complete range of PBN crucibles for MBE available from Veeco
- Veeco PBN crucibles include unique products for Veeco SUMO cells
- Ideal for use in dual filament, modified filament, standard filament, low temperature, dopant, and SUMO cells
Benefits:
- SUMO cell crucibles increase charge carrying capacity for key sources
- Mupltiple proven, reliable PBN crucibles available for virtually any MBE application
Features:
- Heated viewports prevent coating of optical ports in MBE systems
- Optional tabletop DC power supply available
- Heating range from room temperature to >500° Celsius
- 7m fully bakeable cable included
Benefits:
- Continuous, real-time feedback control of crystal growth via in-situ monitoring
- More reliable than conventional, unheated viewports
- No need to vent system to clear As4 coatings
- Easily adaptable to individual MBE production needs
Features:
- Enable users to add MBE-quality deposition capabilities to UHV reactors
- Compatible with a wide variety of MBE sources to grow multiple types of epitaxial films
- Available in wide range of styles including the most common ("source-to-substrate" distances ~4"-10"/102mm-254mm)
Benefits:
- Can greatly expand laboratory capabilities
- Well suited to a wide variety of source-to-substrate distances
- Source flanges available to fit every application
Features:
- Complete line of cables for connecting controllers and MBE effusion cells
- Made of heavy gauge Teflon-coated wire and shielded thermocouple extension
- Fully cleanroom-compatible
- Cables bakeable to 200º C
Benefits:
- Safe, reliable operation with high current-carrying capacity and high operating temperatures
- Suited to a wide range of applications
- No need to remove cables from the MBE system prior to bakeout
Features:
- Rapid (<30 seconds) mounting of full or partial substrates in the same holder ring
- No wires or clips to install; substrate faces downward at all times
- Fabricated from a single piece of molybdenum
- Configurations available to accommodate partial wafers and diffuser plates
Benefits:
- Minimum particulate generation and reduced substrate exposure to the environment
- Maximized ease of use and durability
- Adaptable to a wide range of MBEsystem needs
Features:
- Automated control of piezoelectric valve via Molly Growth Control Software
- Variable unit mounting options
- Rack-mountable controller
Benefits:
- Provides effiicient, precise control of oxygen
- Easy integration and monitoring