Epitaxial Equipment
MBE Components - Systems

Features:

• Closed-loop pressure control
• Pneumatically operated series of on/off valves
• Interlocking mechanisms
• Two modes of operation: LOCAL and REMOTE
• Option to include independent plumbing to introduce H₂ gas into a Atomic Hydrogen Source

Benefits:

• Maximum CBr₄ gas control prevents equipment damage and ensures peek performance
• Means to enhance atomic surface mobility

Features:

• Compact unit directly connects to growth module via isolated gate valve
• Two models to accommodate R&D and production applications

Benefits:

• Virtually eliminates the danger of phosphorus auto-ignition
• Easy integration with MBE system

Features:

• Stabilizes white zone temperature and flux
• Compatible with all previous and current Veeco Valved Crackers

Benefits:

• Simplifies the source process settings
• Constant white zone temperature ensures flux stabilities

Features:

• Can be used with Veeco Valved Crackers 
• Automated remote control or local manual control of a servo motor can be used to drive the valve
• Easily integrated with MBE growth control software

Benefits:

• Provides precise and reproducible flux control through the source needle valve
• Cost-effective and flexible in many different applications
• Can function unattended

Features:

• Can be used with Veeco manipulators
• Automated remote control or local manual control of independent servo motors is used to drive substrate positioning and rotation
• Easily integrated with MBE growth control software

Benefits:

• Provides precise, accurate and reproducible positioning and rotation of substrate
• Directly interfaces with substrate manipulator for optimal closed-loop control and feedback
• Can function unattended

Features:

• Permits hands-free operation using new plasma autotuning unit
• Automatically adjusts and maintains optimal plasma source conditions
• Directly replaces Veeco manual tuner, works with existing power supplies
• Based on popular, proven material delivery system for oxide and nitride applications  

Benefits:

• No need for manual adjustments during experimentation
• Ideal for automating processes in which operating conditions (e.g., gas flow, power level) frequently change
• Ensures stable growth conditions plus exceptional stability, reproducibility and energy-efficiency

Features:

• EpiTrend "always-on" data archiver and display allows comparison of current and historical data
• Liberator^TM feature lets you review logs and data offline
• Recipe checking and diagnostics allow setup and readiness verification
• Highly flexible lot and run sheets, with easy configuration to automatically control platen transfer from module to module
• Lot Manager can initiate user-defined growth recipes

Benefits:

• Maximized system uptime and usability
• More precise control over programming
• Easy-to-use, robust platform for controlling Veeco's automated production MBE systems 
• Minimized downtime and product scrap
• Expandable and upgradeable

Features:

• Complete line of DC power supplies includes integrated PID temperature controllers
• Designed for either closed-loop temperature or power feedback and standalone or stack configuration
• Compatible with all Veeco effusion cells
• Certified for all major regulatory compliance standards
• 4-year parts and labor warranty

Benefits:

• Superior reliability and dependability in a range of applications
• Accurate, reliable operation of MBE source and substrate heaters
• Offer excellent flux stability for MBE sources
• Stack configuration for applications where power requirement is greater than a single power supply can provide

Features:

• Complete range of PBN crucibles for MBE available from Veeco
• Veeco PBN crucibles include unique products for Veeco SUMO cells
• Ideal for use in dual filament, modified filament, standard filament, low temperature, dopant, and SUMO cells

Benefits:

• SUMO cell crucibles increase charge carrying capacity for key sources
• Mupltiple proven, reliable PBN crucibles available for virtually any MBE application

Features:

• Heated viewports prevent coating of optical ports in MBE systems
• Optional tabletop DC power supply available
• Heating range from room temperature to >500° Celsius
• 7m fully bakeable cable included

Benefits:

• Continuous, real-time feedback control of crystal growth via in-situ monitoring
• More reliable than conventional, unheated viewports
• No need to vent system to clear As4 coatings
• Easily adaptable to individual MBE production needs

Features:

• Fast-action (50 ms open or close) alternative to integral shutters for controlling beam flux in MBE systems
• Shutter dampened to reduce shock and vibration
• Action is bellows-sealed and pneumatically driven

Benefits:

• Reliable and durable -- designed for more than 1 million cycles
• Pneumatic actuator prevents interference with RHEED or other sensitive analytical equipment
• Guarded shaft prevents condensed evaporant from clogging the actuator

Features:

• Provides precise control of shutter position in Veeco MBE effusion cell, source flange, and integral shutters
• Choice of manual (via front panel switches) or remote (via TTL-compatible computer inputs) control
• Can be paired with air distribution system to drive shutters
• Shutters actuated by two separate pneumatic lines
• Opening and closing pressures independently regulated

Benefits:

• Flexible design -- can be configured to fit specialized laboratory needs
• Applicable to a wide range of Veeco MBE systems
• Solenoid-driven, two-way manifolds enable pneumatic distribution

Features:

• Enable users to add MBE-quality deposition capabilities to UHV reactors
• Compatible with a wide variety of MBE sources to grow multiple types of epitaxial films
• Available in wide range of styles including the most common ("source-to-substrate" distances ~4"-10"/102mm-254mm)

Benefits:

• Can greatly expand laboratory capabilities
• Well suited to a wide variety of source-to-substrate distances
• Source flanges available to fit every application

Features:

• PBN-constructed diffuser plate
• Robust wire filament available in multiple materials and optional dual filament design
• Optimized filament surface area and heat shielding
• Diffuser material for alternative growth enviroments 
• Available as direct replacement for common MBE systems

Benefits:

• Excellent thermal uniformity
• Prevents hot spot formation
• Reduces power consumption by as much as 50%
• Clean operation
• Optimal reliability and reproducibility
• Corrosion-resistant designs available

Features:

• Complete line of cables for connecting controllers and MBE effusion cells
• Made of heavy gauge Teflon-coated wire and shielded thermocouple extension
• Fully cleanroom-compatible
• Cables bakeable to 200º C

Benefits:

• Safe, reliable operation with high current-carrying capacity and high operating temperatures
• Suited to a wide range of applications
• No need to remove cables from the MBE system prior to bakeout

Features:

• Rapid (<30 seconds) mounting of full or partial substrates in the same holder ring
• No wires or clips to install; substrate faces downward at all times
• Fabricated from a single piece of molybdenum
• Configurations available to accommodate partial wafers and diffuser plates 

Benefits:

• Minimum particulate generation and reduced substrate exposure to the environment
• Maximized ease of use and durability
• Adaptable to a wide range of MBEsystem needs