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Epitaxial Equipment : MBE Components

Gas Source Delivery System New product

Gas Source Delivery System
For precise control of Veeco MBE gas sources

Veeco's Gas Source Delivery System (GSDS) provides precise control of gases, interlocks and monitoring for inert, hazardous and/or flammable gases. Molly® ECS1 Growth Control Software provides for easy integration to your existing system.

A variety of package options are available to suit your needs, and your budget. All packages are inclusive of manual gas line shut off valve for each circuit, gas filter purifier, mass flow controller and pneumatically controlled run and vent valves.

Gas Source Delivery System


More Information
  • Efficient, safe means of controlling gases for Veeco MBE gas sources
  • Easy process manipulation and monitoring
  • Three model configurations to suit specific applications and budgets
  

Contact Veeco for detailed specifications

Data Sheets

  • Gas Source Delivery System
    Low Res [111 KB pdf ]