TurboDisc K465i GaN MOCVD System: Non-Stop Throughput.
Best-in-Class Yield.
The TurboDisc® K465i™ incorporates newly-developed Uniform FlowFlange® technology to deliver a consistently uniform alkyl and hydride flow pattern across all wafers, improving uniformity and repeatability.
It also enables simplified process optimization, greatly improving time to production qualification, and extends Veeco’s lead in capital efficiency for high-volume LED manufacturers.