Epitaxial Equipment : MOCVD Systems

TurboDisc K465 GaN MOCVD System

Automated for highest production, most profitability

The new Veeco TurboDisc® K465 GaN MOCVD System delivers the industry's highest throughput -- and its only production-proven automated MOCVD platform -- for high volume production of GaN-based blue and green LEDs and blue lasers, through advanced TurboDisc reactor technology. Reconfigurable reactor and source modules can accommodate multiple wafer reactor technologies. A fully-automated, high capacity system, the K465 provides and extendable platform for long capital life.

Description

TurboDisc K465 GaN MOCVD System		More Information

Delivers the industry's highest MOCVD throughput for GaN-based blue and green LEDs and blue lasers Automated platform produces more profit for HB-LED manfacturers while controlling capital cost Unique TurboDisc technology assures excellent production yields Industry's highest production automated vacuum loadlock with hot carrier transfer provides highest throughput FlowFlange® discrete injection zones with individual flow matching provide excellent uniformity and repeatability Hot carrier transfer system can be loaded at any time during the process cycle while the reactor remains under vacuum Automatic carrier transfer system does not require parts changes between runs		Contact Veeco for detailed specifications