Metrology & Instrumentation

Veeco’s AFMs bring nanoscale investigation and decades of innovation to every scientific discipline. We have pioneered many of the important advances in AFM technology and platform design, including such techniques as TappingMode™, PhaseImaging™, Torsional Resonance Tunneling AFM, and HarmoniX™ Nanoscale Material Property Mapping, to name just a few. Coupled with our unmatched instrument performance and reliability, as well as our continual investment in the AFM science community through grants, training, and conference sponsorships, it is not surprising that more scientific journal papers credit Veeco AFMs than all other scanning probe systems combined.

Veeco provides world’s premier fully automated AFM systems for in-line semiconductor, data storage, MEMS & other industrial applications. The systems provide the highest level of measurement performance for a variety of automated and semi-automated metrology applications, performing Atomic Force Profilometry, Critical Dimension AFM scanning, TappingMode™ for roughness metrology, and deep trench AFM scan modes. With the ability to meet metrology requirements for 45-nanometer and 32-nanometer node processes, the InSight™ 3D Atomic Force Microscope boasts the fastest throughput of any AFM on the market, as well as a 2x improvement over previous AFM.

Veeco’s Optical Profilers provide an unmatched combination of speed, resolution, and repeatability for surface topography measurements, from sub-nanometer roughness through millimeter-scale steps. With a tradition of nine generations of white light interferometers, Veeco is the world leader in advanced, 3D, non-contact measurement and inspection for research and production. Our profilometry innovations support an enormous variety of applications in solar, semiconductor, magnetic data storage, MEMS, medical implants, and automotive industries, providing customized technology that have fueled advances in everything from consumer electronics to arterial stents.

Veeco’s VCM™ 3D Confocal Microscopes combine the latest in confocal technology and nanometer-scale height measurements with the ease-of-use of a conventional microscope. With their ability to perform fast, non-invasive 3D sample characterization at submicrometer lateral resolution and nanometer vertical resolution, they provide an ideal solution for analyzing high curvature or steep slopes, as well as measuring beneath transparent media. Confocal metrology provides a powerful, yet approachable technology for applications ranging from micro lens arrays and micro fluidic channels, to high roughness surface process control.

Veeco’s industry-standard Dektak® Stylus Profilers accurately assess film thicknesses, step heights, trench depths, stress and surface roughness properties. With over 40 years of stylus profiling firsts, our systems provide an unmatched combination of low-force stylus technology, unique applications-specific options, and powerful analysis software to enable highly detailed, repeatable characterization of even the most difficult to measure materials and features. Dektak profilers offer accurate, reliable data for research and manufacturing of PV cells, MEMS, semiconductors, flat panel displays, optical thin films, materials and finishes.