Ion Beam Etch (IBE) and Physical Vapor Deposition (PVD) technology is enabling tomorrow's Micro-Electro Mechanical Systems (MEMS) and magnetic sensors to decrease form factor while increasing in capability. Veeco’s suite of IBE and PVD equipment meets the critical challenges of next generation MEMS and sensor devices.
Next generation devices such as pressure sensors, accelerometers, gyroscopes, microphones and digital mirror displays have opened the door for integrated MEMS and sensor solutions (“combo sensors”), which enable improved accuracy and wide adoption into a number of everyday applications. More sophisticated process capabilities have provided an opportunity for new and existing manufacturers to redefine what is possible in this market - and it’s only just beginning.
The surging demands of next generation MEMS and magnetic sensors require low cost sensors fabricated by proven, high volume manufacturing techniques. As the world’s leader in IBE and magnetic PVD technology, with over 20 years of experience, Veeco provides this opportunity to the MEMS and sensor industry. Our systems enable precise, uniform films with material flexibility competing technologies do not have. From large manufacturers to small start-ups, the industry looks to Veeco to implement proper solutions for current and next generation MEMS and sensor devices.
Veeco Manufacturing Solutions
Veeco is uniquely positioned to maximize productivity for MEMS and magnetic sensor manufacturers. Our family of IBE and PVD systems come in multiple configurations and allow for R&D or high-volume production. Contact us to learn more.