Epitaxial Equipment

From the world leader in MOCVD and MBE solutions

Industry-leading epitaxial equipment solutions

Veeco is the world's leading supplier of equipment to the compound semiconductor industry, and the only company offering both Metal Organic Chemical Vapor Deposition (MOCVD) and Molecular Beam Epitaxy (MBE) solutions.

Supported by the industry's most advanced Process Integration Center (PIC), we offer cutting-edge equipment for the manufacture of:

HB-LED devices (high-brightness light emitting diodes)
CIGS (copper, indium, gallium and selenium) Solar Cells
Thin Film Magnetic Heads (TFMH) for Hard Drives

Epitaxial Equipment Solutions

MBE Components

Engineered to exacting operational standards, and designed to provide highly reliable, flexible performance, Veeco offers a complete range of MBE system components, including advanced heaters, power supplies, equipment controllers, cabling and software packages developed specifically for MBE processes.

MBE Sources

Veeco offers the most comprehensive selection of sources, including single and dual filament designs. Tailored for numerous elements that require low, medium or high temperatures, they deliver the right vapor pressure required to grow high-purity crystalline epiwafers, in capacities from 1cc to 1700cc. Veeco's patented SUMO^® Sources are the optimal choice for evaporation of high vapor pressure materials, and our latest innovations are enabling the development and production of advanced nitride- and oxide-based devices.

MBE Systems

Veeco provides the industry’s broadest line-up of innovative and reliable MBE systems. From the most proven system for materials research to the silicon-style tools that provide the compound semiconductor industry’s lowest cost of ownership, our systems deliver the high-quality material needed, no matter budget, application or growth plans.

MOCVD Systems

Veeco's patented TurboDisc^® technology, a foundation of MOCVD science for over 20 years, is the basis for our MOCVD systems for the research, development, and high volume manufacture of compound semiconductor materials. Our TurboDisc MOCVD systems ensure exceptional epitaxial material quality for all growth processes, helping manufacturers meet the strict requirements of HB-LEDs, solar cells, laser diodes, HBTs and pHEMTS. Combining manufacturing expertise with extensive R&D capabilities, Veeco offers the industry's highest throughput, most cost effective production proven MOCVD systems.

Epitaxial Systems Application Support

Veeco’s epitaxial equipment products (including MOCVD systems, MBE systems and sources, and a full complement of MBE components) provide enabling solutions for customers in the HB-LED, solar, data storage, semiconductor, scientific research and industrial markets.

Partnering with leading manufacturers from these industries around the globe, Veeco has pioneered significant advances in epitaxial processes, helping to increase yields, enhance productivity through improved platform automation, and deliver sustained quality improvements and reduced cost-of-ownership.

Customer satisfaction is based on more than just superior equipment—it’s the total measure of how that equipment performs in your applications. Contact us to learn more.