Metrology & Instrumentation : Stylus Profilers

1mm Range Kit

The 1mm Range Kit increases your stylus profiler’s maximum vertical range from 512µm to 1mm.  Range kit comes complete with a 900um step calibration standard to verify performance and range.

Analysis Packages

The MicroForm software package reveals difficult shapes and overcomes steep slopes, improving accuracy to within 0.25°.

The Stress Measurement software package calculates tensile and compressive stress on wafers and other materials.

The Stitching software package allows multiple scans to be stitched together with Veeco’s proprietary algorithm for a long scan that accurately determines film stress and substrate shape.

The 3D Mapping software package enables the ability to create large-area, highly accurate topological maps for detailed analysis with the industry-leading Vision software package.

The Cantilever Deflection software package is a unique twist on the scan, where instead of scanning the sample under the stylus, the sample remains fixed and the force on the stylus is ramped. This algorithm is primarily used to determine the properties of cantilevers, such as Young’s Modulus and other bulk physical properties.

Calibration Standards

A number of calibration standards are available to best match system performance to your system and application certification requirements, including NIST- and PTB-traceable 10µm and 50µm step height standards for tracking system performance and certified pitch standards for magnification and lateral calibrations. Each comes with its own serial number and a Certificate of Calibration.

Available standards include 50nm, 100nm, 230nm, 450nm, 1um, 5um, 10um, and 900um.

Pitch Standard

Veeco’s certified pitch standard is primarily used for lateral calibration and magnification calibration.

Step Height Standards

Veeco provides an 8um and 50um NIST-traceable standard for calibration and monitoring.

Styli Type A (0.7um green, 0.2um yellow, 2X20 white , 20X200 pink)

Veeco offers a number of different styli to best suit your stylus profiler application, including high-aspect ratio (HAR) tips for accurate deep trench measurements. Styli come complete with a certificate of certification.
Diamond tip, radii stylus with SEM image verification.

Styli Type B (25um black, 12.5um red, 5um orange, 2.5um grey)

Veeco offers a number of different styli to best suit your stylus profiler application, including high-aspect ratio (HAR) tips for accurate deep trench measurements. Styli come complete with a certificate of certification.

Stylus Replacement Fixture

Every Dektak system comes with a stylus exchange fixture. Replacement stylus exchange fixtures are also available.

The Auto XY stage kit

The Auto XY stage kit provides a full 150mm access in X and Y on the system, for 3D mapping and program automation. It includes the ability to align, deskew and program over 200 sites on a single program.  3D mapping requires the Vision software package.

The Dektak Y-auto stage kit

The Dektak Y-auto stage kit adds a 100mm single axis for performing 3D maps and programmability orthogonal to scan direction. The Y-auto stage kit requires the Vision software package to enable the 3D mapping mode.

The Stress Measurement software package

The Stress Measurement software package utilizes Veeco’s proprietary algorithm to simultaneously calculate tensile and compressive stress on wafers and other substrates. This package enables the Dektak instrument to quickly and accurately perform film delamination studies and other internal thin film stress analyses on a variety of deposited films.

The Vision software package

The Vision software package includes over 200 analyses and visualization tools for post processing data visualization and analysis. This award-winning package visualizes data with 2D and 3D plots with full-screen viewing, rotation, and grid display and includes color palette for heights and background color modification.

Vacuum Chuck

The vacuum chuck provides a 60mm ceramic surface assembly for holding down small parts by vacuum during measurements. Requires smooth vacuum source (24-inch Hg. minimum).

Vibration Isolation Tables

When performing precision metrology, ground vibration and other environment noise can affect data results significantly. To combat this, Veeco offers a choice of air isolation tables, providing optimum conditions for repeatable measurement.