Veeco's InSight 3DAFM Receives Acceptance from SEMATECH
July 06, 2009
ALBANY, N.Y. & PLAINVIEW, N.Y.--(BUSINESS WIRE)--Jul. 6, 2009-- Veeco Instruments Inc. (Nasdaq: VECO), a leading supplier of advanced three-dimensional AFM metrology equipment to the semiconductor industry, announced today that its InSight™ 3D Atomic Force Microscope has been accepted by SEMATECH. The InSight 3DAFM will provide non-destructive reference metrology for critical dimension (CD), overlay and contour, as well as three-dimensional characterization of next-generation EUVL resist features. International SEMATECH Manufacturing Initiative's (ISMI) Metrology Program is located at the College of Nanoscale Science and Engineering’s (CNSE) Albany NanoTech Complex, the most advanced research enterprise of its kind in the world.
“One of the greatest metrology concerns for the 32-nanometer node and below is accuracy as it applies to CD and overlay measurements,” said John Allgair, SEMATECH Metrology Program Manager. “The InSight 3DAFM tool will address this concern and will be used as part of our overall CD metrology strategy to provide reference metrology for CD-SEMs and scatterometry. Additionally the InSight will be used to provide three-dimensional characterization of advanced EUVL resist structures.”
“The addition of Veeco’s InSight 3DAFM at CNSE’s Albany NanoTech provides further capabilities that will enhance leading-edge research and development to accelerate the introduction of EUVL for the manufacturing of innovative nanoelectronics devices,” said Richard Brilla, CNSE Vice President for Strategy, Alliances and Consortia. “Veeco is also a great demonstration of the world-class network of New York companies providing support for the SEMATECH-CNSE partnership, which is enabling advances in nanoscale research, development and commercialization that are critical to industry.”
“Veeco is pleased by the acceptance of the InSight 3DAFM by an industry leader of SEMATECH’s stature,” commented David Rossi, Vice President and General Manager of Veeco’s AFM Business Unit. “With its unique, three-dimensional, accurate 32-nanometer measurement capabilities, the InSight is enabling semiconductor manufacturers to reduce their process development times for advanced technology nodes and speed time to money. Additionally, the InSight’s, non-destructive true profile metrology with TEM-level profile accuracy allows manufacturers to achieve lower development costs by replacing TEM cross-sections. This and the other successful installations in North America, Europe, and Asia, have proven the InSight 3DAFM’s capabilities and performance in both process development and production environments.”
About InSight 3DAFM
The InSight 3DAFM provides non-destructive, high-resolution three-dimensional measurements of critical 45-nanometer and 32-nanometer semiconductor features to determine CD, sidewall angle, and line width roughness on critical layers, including Gate and FinFet structures. The system contains a new high-precision X-Y stage with improved accuracy and a unique pattern recognition system with high-precision laser auto-focus capability. In addition, new AFM control techniques and proprietary probe designs enable improved precision, lower cost per measurement site, and smaller feature measurement. Finally, system reliability is significantly enhanced to meet the demands of 45nm production-based metrology. Further information on InSight can be found at www.veeco.com/insight3dafm .
Veeco Instruments Inc. manufactures enabling solutions for customers in the HB-LED, solar, data storage, semiconductor, scientific research and industrial markets. We have leading technology positions in our three businesses: LED & Solar Process Equipment, Data Storage Process Equipment, and Metrology Instruments. Veeco’s manufacturing and engineering facilities are located in New York, New Jersey, California, Colorado, Arizona, Minnesota and Massachusetts. Global sales and service offices are located throughout the U.S., Europe, Japan and APAC. For more information, visit www/veeco.com .
For over 20 years, SEMATECH® ( www.sematech.org ) has set global direction, enabled flexible collaboration, and bridged strategic R&D to manufacturing. Today, we continue accelerating the next technology revolution with our nanoelectronics and emerging technology partners.
ISMI is a global alliance of the world’s major semiconductor manufacturers, dedicated to reducing cost per wafer and ultimately cost per die, through cooperative programs focused on manufacturing effectiveness. ISMI’s current program portfolio includes ESH, next-generation factories, 450mm, continuous improvement, and metrology. ISMI is a wholly-owned subsidiary of SEMATECH ( www.sematech.org ).
The UAlbany CNSE is the first college in the world dedicated to education, research, development, and deployment in the emerging disciplines of nanoscience, nanoengineering, nanobioscience, and nanoeconomics. CNSE’s Albany NanoTech Complex is the most advanced research enterprise of its kind at any university in the world. With over $5 billion in high-tech investments, the 800,000-square-foot complex attracts corporate partners from around the world and offers students a one-of-a-kind academic experience. The UAlbany NanoCollege houses the only fully-integrated, 300-millimeter wafer, computer chip pilot prototyping and demonstration line within 80,000 square feet of Class 1 capable cleanrooms. More than 2,500 scientists, researchers, engineers, students, and faculty work on site at CNSE’s Albany NanoTech, from companies including IBM, AMD, GlobalFoundries, SEMATECH, Toshiba, Applied Materials, Tokyo Electron, ASML, Vistec Lithography and Atotech. For more information, visit www.cnse.albany.edu .
To the extent that this news release discusses expectations or otherwise makes statements about the future, such statements are forward-looking and are subject to a number of risks and uncertainties that could cause actual results to differ materially from the statements made. These factors include the risks discussed in the Business Description and Management's Discussion and Analysis sections of Veeco's Annual Report on Form 10-K for the year ended December 31, 2008 and in our subsequent quarterly reports on Form 10-Q, current reports on Form 8-K and press releases. Veeco does not undertake any obligation to update any forward-looking statements to reflect future events or circumstances after the date of such statements.
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Source: Veeco Instruments Inc.
Debra Wasser, 516-677-0200 x1472
SVP Investor Relations & Corp. Comm.
Metrology Marketing Communications
Karen Gertz, 805-967-2700 x2412