Process Equipment : Web Coating Systems

Web Coating Systems

Veeco's fully integrated FastFlex™ Web Coating Systems incorporate a flexible architecture that integrates sputtering, reactive sputtering and thermal evaporation solutions. Ideally suited for Mo, TCO and CIGS in thin film solar applications, these systems can incorporate rotatable or planar magnetrons in multiple deposition zones and offer surface pre-cleaning and pumping options, providing a user configurable platform. The CIGS systems integrate Veeco's proven PV-Series™ Thermal Deposition Sources for Cu, In, Ga and Se. The system can be configured in a variety of deposition layouts for optimal process conditions, maximizing material utilization and minimizing thickness nonuniformity. The web coaters are capable of depositing on metal as well as polyimide substrates on widths >350mm.