Process Equipment
CIGS Coating Systems -
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Process Equipment

Features:
- Utilizes Veeco's PV-Series Thermal Evaporation Sources
- Produces up to thirty 1.1m x 1.4m glass panels/hour
- Modular architecture for scalable growth
Benefits:
- Integrated production-scale for CIGS manufacturing on glass
- Leverages Veeco thermal deposition expertise
- Enables low cost of ownership production
Features:
- Flexible architecture integrates sputtering, reactive sputtering and thermal evaporation solutions
- Configurable deposition layouts for optimal process conditions
- Maximize material utilization and thickness uniformity
Benefits:
- Integrates Veeco's proven PV-Series Thermal Deposition Sources
- Deposition-capable for metal as well as polyimide substrates on widths >350mm
- Surface pre-cleaning and multiple pumping options available
- Industry-leading equipment supplier with more than 50 years of thin film expertise