Metrology & Instrumentation
Process Equipment
Epitaxial Equipment
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Process Equipment : Lapping/Dicing Systems

Optium ADS 160 Advanced Dicing System

Optium ADS 160 Advanced Dicing System

Targeted at wafer split/trim, row slice, dice, relief cut applications, the Optium ADS 160 Advanced Dicing System is ESD-safe and built to SEMI-S22 standards. Optional features include automated bar handling. The system is also gang blade capable.

Standard features include:

  • High-speed axis and various spindle selections
  • Rigid structure with process cutting area up to 350 mm
  • Open programming and Vision Systems (Windows GUI, touch screen)
  • Suitable for automation integration