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Process Equipment : Lapping/Dicing Systems

Optium ADS-800 Advanced Dicing System

Optium ADS-800 Advanced Dicing System

Delivering high productivity dicing solutions for a broad range of applications, such as LED devices, solar cells and microelectronics

With over 30 years of diversified dicing applications, Veeco has provided a broad range of process tooling and instrumentation to meeting challenging applications to improve production.  Veeco offers expert solutions for your process that result in higher throughput and quality.

Features and Benefits:

  • Highly stable rigid cast iron structure, multi-blade capabilities and high performance air bearing spindle for smooth, precise motion results in superior and repeatable cut quality
  • Optimized, high speed motion positioning delivers fast, efficient dicing cycles due to powerful network control technology and rapid vision acquisition for single or multi-blade applications
  • Engineered solutions for demanding processes achieved through high performance spindles, proprietary tooling, integral blade truing and active software monitoring for areas up to 9”

High Performance Spindles

These spindles are high in stiffness and torque air bearing with low harmonics.  The Optium® ADS™-800 Advanced Dicing System accommodates blade sizes from 51mm to 114mm.  Spindle selections will include single and multi-blade applications.

On-Line Blade Truing – A crucial step in many applications

  • Eliminates blade hammering on the workpiece caused by blade “out of round” condition
  • Eliminate blade O.D. variation on multi-blade assemblies
  • Maintain blade face square profile for thin tape, min radius trench groove and others