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Ion Sources
Gridless Anode Layer Ion Sources - Systems

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Ion Sources
Linear Anode Layer Ion Source - Linear source provides high power beams for thin film processes
Linear Anode Layer Ion Source  
 

Key Features:

  • Designed for high volume, low maintenance operation
  • Supports beam energies between 100 and 1800eV
  • Also supports beam currents up to 30mA/linear cm
  • Ideal source for multiple thin film applications
ALS 340 - Excellent for long, uninterrupted production runs
ALS 340  
 

Key Features:

  • Designed for high volume, low maintenance operation
  • Provides both gridless and filamentless operation with all inert and reactive gases
  • Ideal source for multiple thin film applications
ALS 1000 - For processes including sputter and ion beam assisted deposition
ALS 1000  
 

Key Features:

  • Designed for high volume, low maintenance operation
  • Provides both gridless and filamentless operation with all inert and reactive gases
  • Ideal source for multiple thin film applications

 

ALS 1500 - Large format linear source for efficient, uninterrupted runs
ALS 1500  
 

Key Features:

  • Designed for high volume, low maintenance operation
  • Provides both gridless and filamentless operation with all inert and reactive gases
  • Ideal source for multiple thin film applications