Metrology & Instrumentation
Process Equipment
Epitaxial Equipment
Process Equipment
Ion Beam Etch - Systems
NEXUS IBE-350Si Ion Beam Etching System 
The NEXUS IBE-350Si Ion Beam Etching System was designed to be the process match to the legacy RF350S tools.
The NEXUS IBE-350Si Ion Beam Etching System was designed to be the process match to the legacy RF350S tools.
NEXUS IBE-420i Ion Beam Etching System
Ion Beam Etching System offering higher device yields through improved CD sigma control for data storage applications.
Ion Beam Etching System offering higher device yields through improved CD sigma control for data storage applications.
NEXUS IBE-420Si Ion Beam Etching System
Ion Beam Etching System offering unsurpassed uniformity over a wide range of energy and process angles, for etch depth control of next-generation ABS step and cavity processing.
Ion Beam Etching System offering unsurpassed uniformity over a wide range of energy and process angles, for etch depth control of next-generation ABS step and cavity processing.
NEXUS IBE-Ion Beam Etching System
Ion Beam Etching System designed for the high throughput demands of ABS deep cavity processing.
Ion Beam Etching System designed for the high throughput demands of ABS deep cavity processing.
NEXUS Oxidation Module
Oxidation modules provide versatility for formation of ultra-thin nano oxide and tunnel barrier layers.
Oxidation modules provide versatility for formation of ultra-thin nano oxide and tunnel barrier layers.