Metrology & Instrumentation
Stylus Profilers - Dektak Systems

Features:

• Large standard Z range of 1 millimeter enables larger step measurements
• Optional X-Y and Y automated stage delivers programmability of over 200 locations
• Cast aluminum frame and rigid support elements
• Easy measurement setup
• 200 mm wafer support

Benefits:

• Cost-effective, complete solution for numerous research and industry applications
• Economical 3D mapping capability
• Industry-leading sample flexibility
• Industry-best 4-angstrom repeatability
• Industry’s lowest noise floor

Features:

• Combines high repeatability, low-force sensor technology, and advanced 3D data analysis
• 7.5 angstrom, 1 sigma step height repeatability and a vertical range of up to 1mm
• Overhead gantry design enables scan lengths to 200mm
• N•Lite™ low force sensor option offers stylus forces down to 0.03mg
• High aspect ratio tips ideal for measuring Shallow Trench Isolation (STI) etch depth and deep structures

Benefits:

• Ideal for surface characterization of MEMS, semiconductors and other thin/thick films
• Well suited to planarity and flatness measurements
• Scratch-free measurement of soft materials
• Allows use of super-sharp styli to characterize sub-micron lines and spaces